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084-所以7纳米到底厉不厉害嘛
Manage episode 274372856 series 40106
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由于光有波长，因此，用光来刻蚀依然会遇到精度的问题。如何能够刻蚀出精度更高的芯片，很大程度上取决于我们如何能找到更短波长的光。我们往往会听到两个纳米尺度的数值，一个是芯片线宽，一个是光源波长。如果没有办法打破ASML13.5nm极紫外的光源技术路径，用193nm的光源套刻出现在7nm的芯片也挺香的，但和极紫外还是差了一个世代的技术。
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